Small footprint
Throughput speed from 300 l/s to 4,500 l/s
Throughput up to 6 slm and improved H2, N2, and Ar performance
EDWARDS Maglev turbomolecular Pump series
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EDWARDS Maglev turbomolecular Pump series
Detail The Advanced Series delivers high levels of throughput and is ideal for your semiconductor etching and CVD processes:
Small footprint
Throughput speed from 300 l/s to 4,500 l/s
Throughput up to 6 slm and improved H2, N2, and Ar performance |